Agilent Technologies B1500A Instrukcja Obsługi Strona 113

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Agilent B1500A/B1505A Programming Guide, Edition 11 2-27
Remote Mode Functions
Measurement Modes
Quasi-static CV Measurements
Quasi-static CV (QSCV) measurement is performed as shown. The specified SMU
performs the measurement at the sweep steps except for the sweep start voltage and
stop voltage. At each sweep step, current and voltage are measured during the
voltage transition from Nth step voltage-cvoltage/2 to Nth step voltage+cvoltage/2,
and capacitance is calculated by using the measured values. Where, cvoltage is the
capacitance measurement voltage. For the measurement operation, see Figure 2-17.
For the capacitance data calculation, see “Capacitance Data” on page 2-29.
Source parameters; start, stop, cvoltage, and step are set by the QSV command.
Time parameters; hold time, delay1, delay2, linteg, and cinteg are set by the QST
command. linteg and cinteg are the integration time for the leakage current
measurement and the capacitance measurement, respectively.
Figure 2-17 Setting Parameters and Operation of QSCV Measurement
stop
(limit of sweep source output)
start
(limit of sweep source output)
step voltage
Vq
hold time
delay1
cvoltage= 2
×
Vq
cinteg
IL
0
, V
0
I, Vavg
IL, V
delay1
Measurement items at Nth step
linteg linteg
Vq
delay1
0 V
Trigger (XE)
1st step
voltage
2nd step voltage
3rd step voltage
last step voltage
step voltage
delay2
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