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Agilent B1500 User’s Guide, Edition 7 2- 3
Introduction
Overview
Overview
Agilent B1500A Semiconductor Device Analyzer is the new generation one box
solution for the semiconductor device DC/AC parametric measurement and analysis
application. You can perform measurement and analysis easily and effectively on
the Microsoft Windows environment with intuitive graphical user interface, touch
screen LCD panel, keyboard, and mouse by using Agilent B1500A.
Agilent B1500A provides the DC voltage/current output capability, the DC
voltage/
current measurement capability, and the AC signal output and impedance
measurement capability. So you can perform the current-voltage sweep
measurement and the capacitance-voltage sweep measurement for example by one
instrument. You can also analyze the measurement result characteristics graph by
using several tools such as markers, cursors, and lines.
Also, in the GPIB remote control mode, you can control the B1500A from an
ex
ternal com
puter by using Agilent FLEX command set that is the common
language for Agilent semiconductor DC measurement instruments. So you can reuse
the measurement program created for Agilent 4155/4156/E5260/E5270.
- Agilent B1500A 1
- Manual Part Number 2
- Warranty 2
- Technol o gy Licenses 2
- Restricted Rights Legend 2
- Safety Summary 5
- Safety Symbols 7
- /HRSMU の場合は最大± 100 9
- B1500 を設置すること。 9
- Precautionary Statement 12
- Working in Comfort 13
- In This Manual 15
- Online Documents 17
- Utilities 18
- Contents 19
- 1 Getting Started 33
- To Turn On/Off B1500A 35
- To Turn B1500A On 36
- To Turn B1500A Off 36
- To Launch EasyEXPERT 38
- If Only One Workspace Exists 39
- To Create Workspace 40
- To Select Workspace 41
- To Use Application Test Mode 42
- Test Definitions 43
- To Use Classic Test Mode 44
- To Perform Measurement 46
- To Use Test Result Editor 47
- To Use Analysis Tools 48
- 2 Introduction 49
- Application Library 50
- Overview 51
- Agilent EasyEXPERT Software 53
- Front View 55
- About screen adjustment 56
- To disable the touch panel 57
- Rear View 58
- *1'8 64
- &RPPRQ 64
- About SMU 65
- B1510A High Power SMU 66
- B1511A Medium Power SMU 69
- B1517A High Resolution SMU 72
- To connect ASU 75
- Before using 1 pA range 75
- B1520A Multi Frequency CMU 76
- 300 k7 range 78
- 50 7 range 78
- B1525A High Voltage SPGU 79
- B1530A WGFMU 80
- Specifications 81
- Specification Conditions 82
- Mainframe 83
- MPSMU/HRSMU 85
- Introduction 86
- Measurement accuracy 87
- Connection path control 88
- value in mV) 90
- SMU Common Specifications 92
- SMU Supplemental Information 93
- ± 1 mV (HPSMU) 94
- SCUU/GSWU 101
- Point Time Voltage 107
- Selector 108
- Selector Adapter 108
- WGFMU/RSU 109
- Functions 113
- Application library 113
- Measurement mode details 114
- Analysis capabilities 117
- Auto analysis function 117
- Graph plot 118
- Other functions 118
- Furnished Software 119
- Features and benefits 120
- System requirements 121
- General Specifications 123
- Accessories and Options 124
- 3 Installation 131
- Requirements 133
- Ventilation Requirements 134
- Power Cable 134
- Installation 135
- Inspection and Installation 136
- To Perform Initial Setup 137
- Other Windows setup 138
- To Change GPIB Address 139
- To Enable System Controller 140
- Installing Accessories 141
- To Set up 16442B 142
- To Connect 16442B 142
- To Connect Connector Plate 144
- To Connect ASU 147
- Figure 3-2 To Connect ASU 149
- About ASU output cables 150
- To Connect SCUU/GSWU 151
- 6&88 152
- About SCUU output cables 153
- To Connect GNDU Adapter 155
- To Interconnect SPGUs 156
- Mounting Connectors 157
- ï ï0[ 158
- 158
- To Make an Interlock Circuit 159
- To Connect GNDU Output 162
- To Connect SMU Output 163
- To Minimize Leakage Current 164
- To Connect MFCMU Output 169
- Stop key 170
- Using Test Fixture 171
- 6089 $0D[ 172
- 'UDLQ 172
- 6XEVWUDWH 172
- To Reduce Leakage Current 173
- '87 174
- To Measure Low Resistance 175
- Switching Matrix 177
- Required Conditions 178
- )25&(RU6(16($ 183
- )25&(RU6(16(% 183
- ,QVXODWRU 183
- 7ULD[LDO&DEOH 183
- Maintenance 185
- About Plug-in Modules 186
- Module Type and Locations 187
- 4 Using EasyEXPERT 189
- Touch Screen Operation 191
- Start EasyEXPERT 192
- Workspace Configurator 193
- If there is one workspace 194
- Using EasyEXPERT 196
- Main Screen 198
- Main Screen GUI 199
- Run Option 206
- Data Display Manager 207
- Data Display Properties 208
- Test Result Editor 209
- Test Results Data Filter 210
- Export in My Format 210
- Test Results Data Auto Export 212
- Test Results Data Properties 214
- Application Test 215
- Quick Test 217
- Repeat Measurement Setup 219
- Organize Preset Group 221
- Calibration 223
- SMU Zero Cancel 224
- CMU Calibration 225
- Configuration 229
- SMU/PG Selector 233
- Event Log 233
- Extended Configuration 234
- Standby Channel Definition 238
- Data Display 239
- About Display Mode 240
- Updating Data Calculation 240
- Append Measurement 240
- Multi Display Function 240
- Data Display GUI 241
- EPSHPIJLIRUSQJIRUPDW 242
- &RS\WR&OLSERDUG 244
- 3DVWHWR:RUG3DG 244
- 3DVWHWR1RWHSDG 244
- Display Setup 250
- Graph Properties 251
- List Display Properties 252
- Tool Bar 252
- Data Status 255
- Mouse/Touch Panel 256
- Rotary Knob 256
- Softkeys 256
- Keyboard 257
- Preview Window GUI 262
- Preview Settings 264
- Text File Export settings 265
- 5Classic Test Definition 269
- If You Use GNDU (Ground Unit) 271
- I/V Sweep 272
- Channel Setup 273
- Measurement Setup 274
- + Ratio × VAR1 outpu 275
- Offset value 275
- Multi Channel I/V Sweep 277
- I/V List Sweep 281
- Define vector data 286
- I/V-t Sampling 289
- C-V Sweep 294
- Direct Control 298
- Advanced Setup 302
- Primary Setup 303
- Command Setup 304
- ReadDataBuffer 305
- Function Setup 310
- Auto Analysis Setup 311
- Classic Test Definition 315
- SMU Range Setup Window 316
- To use 1 pA range 317
- Advanced Setup Window 319
- CMU Range Setup Window 321
- Switching Matrix Control 323
- SPGU Control 325
- SPGU Pulse Setup Window 327
- Load Z Setup Window 329
- Pulse Switch Setup Window 330
- SPGU ALWG Setup Window 331
- Define ALWG Waveform Window 332
- Waveform Pattern Editor 335
- 6 Application Test Definition 337
- Test Definition Window 339
- Test Specification 341
- Define Layout GUI 346
- Properties 348
- To Select Entry Fields 349
- To Move Entry Fields 349
- Test Output 350
- Analysis Parameter Definition 351
- Test Contents 352
- Debugging Test Contents 357
- Variable Inspector 358
- External Variable Setup 359
- Local Variable Definition 360
- Program Component 362
- Auto Analysis 363
- Data Display Control 366
- Display Data Setup 367
- GPIB I/O 369
- Data Store Control 375
- Command Execution 376
- Using Command Execution 378
- Defining Format Field 381
- Setup Example 382
- 7 Function Details 383
- • “SMU CMU Unify Unit” 384
- I/V Sweep Measurement 385
- Output Range 386
- Basic Sweep Measurement 386
- Pulsed Sweep Measurement 391
- Function Details 393
- Figure 7-7 SMU Pulse 393
- Voltage or current 394
- I/V-t Sampling Measurement 395
- Time data and index 396
- Setup Parameters 397
- Time Data and Index 399
- Stop Condition 400
- C-V Sweep Measurement 401
- About Impedance Measurements 403
- Error Correction 406
- SPGU Module 408
- PG Operation Mode 409
- SPGU Pulse Setup Parameters 410
- Simultaneous output: 412
- Sequencial output: 412
- ALWG Operation Mode 416
- Sweep Abort Function 418
- Standby Function 419
- To Use Standby Function 421
- Bias Hold Function 422
- Current Offset Cancel 424
- Module type 425
- SMU CMU Unify Unit 426
- Before using SCUU 427
- Atto Sense and Switch Unit 428
- Before using ASU 429
- SMU Ranging Mode 431
- Auto Ranging 432
- Limited Auto Ranging 433
- Fixed Range 433
- Compliance Range 433
- SMU Compliance 435
- Power Compliance 436
- To Set Compliance 437
- SMU Pulse 438
- SMU Measurement Time 439
- Overhead Time 441
- To Specify Source Output Time 441
- Wait Time 442
- Multiple Measurement Channels 443
- SMU Filter 444
- SMU Series Resistor 445
- Interlock Function 446
- Auto Power Off Function 447
- Initial Settings 448
- 8 Built-in Programming Tool 451
- Variables and Expressions 453
- Constants 454
- Literals 455
- Built-in Functions 456
- Read Out Functions 456
- B=delta(A) 459
- C=diff(A,B) 459
- C=integ(A,B) 461
- B=isValid(A) 461
- B=lgt(A) 461
- B=log(A) 462
- C=mavg(A,B) 462
- B=string(A) 464
- B=swmToModule(A) 464
- B=tan(A) 464
- B=value(A) 464
- Functions for Line 466
- Script Program Statements 469
- Built-in Programming Tool 474
- 9 If You Have a Problem 475
- When You Operate B1500A 477
- ASU is not Detected 478
- To Simplify the Connections 479
- When You Perform Measurement 480
- Measurements 482
- Measurement 484
- To Make Backup 486
- To Check Module Slots 486
- Data Backup and Recovery 488
- Folders to Backup 489
- To Make Database Backup 489
- To Restore Database Backup 490
- To Make Backup of Other Data 491
- B1500A System Recovery 493
- To Initialize Database 494
- To Restore Database 495
- Updating EasyEXPERT 496
- Error Codes 497
- Agilent FLEX Execution Error 522
- AC test 540
- 3465 IM short test failed 544
- If You Have a Problem 552
- Application Test Definitions 555
- B1500A SMU 2 564
- Maximum Measurement Value 565
- Capacitance (F) 566
- HPSMU/MPSMU/HRSMU/ASU 568
- Reading Accuracy (%) 576
- Offset Accuracy (F) 576
- License Management Tool 601
- Setup File Converter 602
- Setup File Converter GUI 603
- Utility Programs 604
- SetupFileConverter.exe 605
- hu¿hÉ_uU=Ë 614
- uËh¿É_uU=Ë 614
- Desktop EasyEXPERT 619
- About Desktop EasyEXPERT 620
- System Requirements 621
- To Install Desktop EasyEXPERT 622
- To Start Desktop EasyEXPERT 623
- Execution Mode dialog box 623
- Start EasyEXPERT window 624
- Using 4155B/4156B/4155C/4156C 626
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