Agilent Technologies B1500A Podręcznik Użytkownika Pobierz pdf (Strona 485)

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101

Agilent B1500 User’s Guide, Edition 7 9-11

If You Have a Problem

When You Perform Measurement

Unexpected Sampling Measurement Data is Returned

If sampling interval is set to a short time and if FILTER ON is set, you may get

unwanted data. FILTER ON causes a slower rise time, so short initial interval will

sample during this rise time.

To solve this problem:

• Set FILTER field to OFF if you set initial interval to a short time.

Some data may be skipped because measurement takes a long time. Meas

urement

takes a long time if measurement is performed in a low current range, if many

measurement channels are set up, or if analysis, such as moving a marker, is

performed during measurements.

To solve this problem:

• Measure current using a fixed range that is more than 10 μA. For measur

ement

ranges 10 μA or less, measurement takes longer than the specified integration

time.

• Do not perform analysis operation during measurement state.

MFCMU Causes Unbalance Condition

Extending measurement cables may cause the unbalance condition of the MFCMU.

To solve this problem:

• Perform the phase compensation. See “CMU Calibration” on page 4-37.

• The signal path from MFCMU to DUT must be as short as possible.

• Reduce stray capacitance and guard capacitance on the signal line.

Do not connect the Low (Lcur, Lpot) term

inal to the w

afer chuck. If the

MFCMU must be connected to the wafer chuck, use the High (Hcur, Hpot)

terminal to connect to the wafer chuck.

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