8
Supported Pulse Generators:
81110A and 8114A
Maximum Number of Installable Pulse
Generators:
81110A
×
5 (without 8114A)
81110A
×
4 (with 8114A × 1)
81110A
×
2 (with 8114A × 2)
Pulse Force Mode
Pulse Signal:
2-level and 3-level output
Burst Count:
10
9
(max.) or infinite
Output mode
Normal mode or Pattern mode
Normal mode
All pulse generators (up to 5)
can force synchronously.
Pattern mode
All pulse generators except
the master pulse generator
can force synchronously (more
Accuracy is specified between any
two output pins except chuck
connection pin.
Measurement range:
1 fF to 1.2 nF and 10 nS to
7.5 mS (1 MHz)
1 fF to 10 nF and 1 nS to
6.3 mS (100 kHz)
1 fF to 100 nF and 0.1 nS to6.3
mS (10 kHz)
DC Bias Range and Accuracy
Accuracy is specified between
CMH and CML pins.
Test signal level: 30 mV (rms)
Bias Current Isolation Function:
OFF
Full-Scale Force Accuracy
Voltage Range ±(% of reading % of range + volt)
±40 V 0.1% + 10 mV
C Accuracy G Accuracy
Frequency C Range % of reading + % of range G Range % of reading + % of range
10 pF
1
0.8% + [1.0 + (0.6 × Gm
2
/63 µS)]% 63 µS
1
0.8% + [1.0 + (0.6 × Cm
3
/10 pF)]%
100 pF 0.8% + [0.3 + (0.6 × Gm/630 µS)]% 630 µS 0.8% + [0.3 + (0.6 × Cm/100 pF)]%
1 nF 1.5% + [0.2 + (1.7 × Gm/6.3 mS)]% 6.3 mS 1.3% + [0.2 + (2.2 × Cm/1 nF)]%
10 pF
1
0.4% + [1.0 + (0.3 × Gm/6.3 µS)]% 6.3 µS
1
0.4% + [1.0 + (0.4 × Cm/10 pF)]%
100 pF 0.3% + [0.3 + (0.3 ´ Gm/63 µS)]% 63 µS 0.3% + [0.3 + (0.3 × Cm/100 pF)]%
1 nF 0.3% + [0.2 + (0.4 × Gm/630 µS)]% 630 µS 0.3% + [0.2 + (0.4 × Cm/1 nF)]%
10 nF 0.5% + [0.2 + 1.0 × (Gm/6.3 mS)]% 6.3 mS 0.7% + [0.2 + (0.8 × Cm/10 nF)]%
100 pF 0.3% + [0.2 + (0.3 × Gm/6.3 µS)]% 6.3 µS 0.3% + [0.2 + (0.3 × Cm/100 pF)]%
1 nF 0.3% + [0.1 + (0.3 × Gm/63 µS)]% 63 µS 0.3% + [0.1 + (0.3 × Cm/1 nF)]%
10 nF 0.3% + [0.1 + (0.3 × Gm/630 µS)]% 630 µS 0.3% + [0.1 + (0.3 × Cm/10 nF)]%
100 nF 0.3% + [0.1 + (1.0 × Gm/6.3 mS)]% 6.3 mS 0.7% + [0.1 + (0.7 × Cm/100 nF)]%
100 pF
1
0.4% + [0.5 +(0.4 × Gm/0.63 µS)]% 0.63 µS
1
0.4% + [0.5 + (0.4 × Cm/100 pF)]%
1 nF 0.3% + [0.1 + (0.3 × Gm/6.3 µS )]% 6.3 µS 0.3% + [0.1 + (0.3 × Cm/1 nF)]%
10 nF 0.3% + [0.1 + (0.3 × Gm/63 µS)]% 63 µS 0.3% + [0.1 + (0.3 × Cm/10 nF)]%
100 nF 0.3% + [0.1 + (0.3 × Gm/630 µS)]% 630 µS 0.3% + [0.1 + (0.3 × Cm/100 nF)]%
C/G Measurement Range, Resolution, and Accuracy
1
Supplemental Characteristics
2
Gm = Measured conductance
3
Cm = Measured capacitance
1 MHz
100 kHz
10 kHz
1 kHz
10 fF to 100 nF and 0.1 nS to
0.63 mS (1 kHz)
Measurement frequency:
1 kHz, 10 kHz, 100 kHz, and
1 MHz
DC Bias Voltage: ±40V
Measurement speed:
MEDIUM or LONG
Note: Above specifications are valid after calibration
data measurement and offset cancel.
Note: Accuracy is specified between any DUT pins. Stray capacitance between force and guard must be under 5 pF.
Frequency accuracy: ±0.1%; Test signal level: 30 mVrms ± 5 mV
rms
When measurement speed is set to SHORT, add 0.25% to the % of reading and 0.1% to the % of range.
When Open/Short calibrations at the DUT pins are carried out, accuracy is the same as in the above table. (Note that the
length of cable from the output pins must be less than 1 meter, and capacitance to guard must be under 100 pF.)
Pulse Force Unit: PGU Option
Capacitance Measurement Subsystem: Agilent E4980A LCR Meter
(428 strony)
(18 strony)
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