Agilent Technologies 8114A Instrukcja Użytkownika Pobierz pdf (Strona 2)

General Description(continued)

High-Frequency Pulse Force:

PGU Option

Supported pulse generators:

Agilent 81110A and 8114A

Maximum number of installable

pulse generators:

5

×

81110A

(without 8114A)

4

×

81110A

(with 1

×

8114A)

2

×

81110A

(with 2

×

8114A)

Pulse level (at open load):

±19 V (81110A),

–49.9 V to + 50 V (8114A)

Pulse period:

350 ns to 999 s (81110A)

350 ns to 999 ms (8114A)

Pulse width:

50 ns to 999 ms (81110A)

150 ns to 150 ms (8114A)

Pulse delay: 0 s to 998 ms

Transition time:

20 ns to 200 ms (81110A)

65 ns (8114A)

Measurement functions

DC Current, DC Voltage, Capaci-

tance and Conductance, Differen-

tial voltage and Pulse force.

DC Measurements

Spot, Sweep, Pulse Bias, and

Pulse Sweep.

Measurement unit:

HRSMU (High Resolution SMU),

MPSMU (Medium Power SMU

and HPSMU (High Power SMU)

Measurement range:

10 fA

1

to 100 mA, 2 µV to 100 V

(using the two low current SMU

ports) 100 fA to 1 A

2

, 2 µV to

200 V

2

(using the 6 standard

SMU ports)

1

Using HRSMU. Using MPSMU, 100 fA

to 100 mA, 2 µV to 100 V

2

Using optional HPSMU. Using MPSMU,

100 fA to 100 mA, 2 µV to 100 V

Capacitance/Conductance

Measurements Using Agilent

E44980A LCR Meter Option

Measurements: C/G and C/G-V

Measurement unit: Agilent

E4980A LCR Meter

Measurement Frequency: 1 kHz,

10 kHz, 100 kHz, and1 MHz

Measurement range: 1 fF to

100 nF, 0.1 nS to 7.5 mS

DC Bias Voltage: ±40 V

Two Terminal Differential Voltage

Measurements

Measurement unit: Agilent 3458A

Measurement range:

0.1 µV to 100 V

2

High-Frequency Pulse Force:

HV-SPGU Option

1

The 4073A cabinet supports a

semiconductor pulse generator

unit (HV-SPGU) mainframe option

that contains the SPGU modules.

This is mutually exclusive with

the 81110A/8114A PGU option.

Maximum number of installable

SPGU modules: 5

Number of channels per

HV-SPGU: 2

Pulse level support: Each HV-

SPGU channel supports 2-level

and 3-level pulses

Pulse Level (at open load): ±40 V

(at 2-level and 3-level)

Pulse Period (at 50 Ω load): 350 ns

to 10 s with 10 ns resolution

Pulse Width (at 50 Ω load): 50 ns

to [Period − 50 ns] with 2.5 ns

2

or 10 ns

3

resolution

Pulse Delay (at 50 Ω load); 0 s to

[Period − 75 ns] with 2.5 ns

2

or

10 ns

3

resolution

Transition Time Setting Range (at

50 Ω load): 20 ns to 400 ms with

2 ns

2

or 8 ns

3

resolution

Transition Time Minimum (at 50 Ω

load): 20 ns

4

; 30 ns

5

1

Requires Linux system controller

2

Transition time setting ≤10 µs

3

Transition time setting >10 µs

4

|Vamp | ≤10 V (to 50 Ω)

5

10 V < |Vamp| ≤20 V (to 50 Ω)

Switching Matrix Measurement

Pins

Between 12 and 48 pins

Note: One additional pin is dedicated for

the prober chuck connection.

Switching Matrix Instrument

Ports

Up to eight SMUs

One ground unit (GNDU)

Eight auxiliary (AUX) ports

Six high-frequency (HF) ports

48 extended paths

Pulse switch input/output ports

1 2 3 4 5 6 7 ... 11 12

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