Voltage Source/Monitor Range, Resolution, and Accuracy using MPSMU and HPSMU
Force Accuracy is calculated as follows:
±(a % of output setting value + b% of output voltage range + c) (V)
Measure Accuracy is calculated as follows:
±(a % of measure value + b% of measurement voltage range + c) (V)
Io = Output Current, Rmat = Residual Resistance of Switching Matrix Force Port
Note: Rmat is different at each port. When using prober chuck connection pin, add 0.1 Ω to Rmat.
Low Current Port (SMU1 and SMU2): 1.0 Ω
Kelvin Port: (SMU3 to SMU6); 3 mΩ
Non-Kelvin Port (SMU7 and SMU8): 1.0 Ω
1
Using HPSMU
5
Current Source/Monitor Range, Resolution, and Accuracy using HRSMU connected to SMU1 and SMU2 ports
Full Scale
Voltage Range
±2 V
±20 V
±40 V
±100 V
±200 V
1
Force Resolution
100 µV
1 mV
2 mV
5 mV
10 mV
Measure Resolution:
High Speed
100 µV
1 mV
2 mV
5 mV
10 mV
Measure Resolution:
Precision
2 µV
20 µV
40 µV
100 µV
200 µV
Force Accuracy
a: 0.05%
b: 0.05%
c: Rmat
×
Io
Measure Accuracy
a: 0.04%
b: 0.04%
c: Rmat
×
Io
a: 0.045%
b:0.04%
c: Rmat
×
Io
±100 mA 5 µA 5 µA 100 nA
±10 mA 500 nA 500 nA 10 nA
±1 mA 50 nA 50 nA 1 nA
±100 µA 5 nA 5 nA 100 pA
±10 µA 500 pA 500 pA 10 pA
±1 µA 50 pA 50 pA 1 pA
±100 nA 5 pA 5 pA 100 fA
±10 nA 500 fA 500 fA 10 fA
±1 nA 50 fA 50 fA 10 fA
±100 pA 5 fA 5 fA 2 fA
±10 pA 1 fA 2 fA 1 fA
a:0.12 %
b: 0.05 + 0.0001 × Vo %
c: 0
a: 0.06 %
b: 0.04 + 0.0001 × Vo %
c: 0
a: 0.06 %
b: 0.05 + 0.0001 × Vo%
c: 0
a: 0.07 %
b: 0.04 + 0.0001 × Vo %
c: 0
a: 0.07 %
b: 0.05 + 0.0001 × Vo %
c: 0
a: 0.12 %
b: 0.04 + 0.0001 × Vo %
c: 0
a: 0.12 %
b: 0.05 + 0.0001 × Vo %
c: 1 fA/V × Vo
a: 1 %
b: 0.05 + 0.0001 × Vo %
c: 3 pA + 1 fA/V × Vo
a: 1%
b: 0.07 + 0.0001 × Vo %
c: 3 pA + 1 fA/V × Vo
a: 4 %
b: 0.4 + 0.0001 × Vo %
c: 500 fA + 1 fA/V × Vo
a: 4 %
b: 4.0 + 0.0001 × Vo %
c: 500 fA + 1 fA/V × Vo
a: 0.1 %
b: 0.04 + 0.0001 × Vo %
c: 0
a: 0.06%
b: 0.03 + 0.0001 × Vo %
c: 0
a: 0.06%
b: 0.04 + 0.0001 × Vo %
c: 0
a: 0.06%
b: 0.035 + 0.0001 × Vo %
c: 0
a: 0.06%
b: 0.04 + 0.0001 × Vo %
c: 0
a: 0.12%
b: 0.035 + 0.0001 × Vo %
c: 0
a: 0.12%
b: 0.04 + 0.0001 × Vo %
c: 1 fA/V × Vo
a: 1%
b: 0.04 + 0.0001 × Vo %
c: 3 pA + 1 fA/V × Vo
a: 1%
b: 0.04 + 0.0001 × Vo %
c: 3 pA + 1 fA/V × Vo
a: 4%
b: 0.12 + 0.0001 × Vo %
c: 500 fA + 1 fA/V × Vo
a: 4%
b: 1.0 + 0.0001 × Vo %
c: 500 fA + 1 fA/V × Vo
Full Scale Measure Resolution: Measure Resolution:
Current Range Force Resolution High Speed Precision Force Accuracy Measure Accuracy
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