SMU configuration
Minimum configuration:
One HRSMU and two MPSMUs
(default configuration)
A maximum of two HRSMUs can
be installed and connected only
to the SMU1 and SMU2 ports. A
maximum of two HPSMUs can be
installed and connected only to
the SMU3 and SMU4 ports. The
first HPSMU must be connected
to SMU3 and the second to
SMU4. The default configuration
of the 4073A has one HRSMU
(connected to the SMU2 port)
and two MPSMUs (connected to
the SMU3 and SMU4 ports). The
following tables indicate the
installation order for additional
SMUs.
One HRSMU and no HPSMU installed in
addition to MPSMUs
Two HRSMU and one HPSMU installed in
addition to MPSMUs
DC Mearurement Subsystem:
Ground Unit (GNDU)
This unit is used for ground
when making measurements.
Output Voltage: 0 V
Maximum Current: ±1.6 A
Offset Voltage: ±200 µV
Maximum Capacitance Load
(Supplemental Characteristics):
1 µF
DC Measurement Subsystem:
Digital Volt Meter (Agilent 3458A)
Voltage Measurement Range,
Resolution, and Accuracyv(at
number of Power Line Cycles ≥1)
Two HRSMUs and one HPSMU installed in
addition to MPSMUs
7
Two HRSMUs and no HPSMUs installed in
addition to MPSMUs
One HRSMU and two HPSMUs installed in
addition to MPSMUs
Two HRSMUs and two HPSMUs installed
in addition to MPSMUs
Full-Scale Accuracy
Voltage Range Resolution (% of reading + volt)
1 V 1 µV 0.01% + 100 µV
10 V 10 µV 0.01% + 200 µV
100 V 100 µV 0.02% + 1 mV
0.1 V 0.1 µV 0.01% + 100 µV
Port Installed Installation order for
Number SMU additional SMUs
1 MPSMU 2
2 MPSMU Default
3 HRSMU Default
4 MPSMU Default
5 MPSMU 1
6 MPSMU 3
7 MPSMU 4
8 MPSMU 5
Port Installed Installation order for
Number SMU additional SMUs
1 MPSMU 1
2 HRSMU Default
3 HPSMU Optiona HPSMU
4 MPSMU Default
5 MPSMU Default
6 MPSMU 2
7 MPSMU 3
8 MPSMU 4
Port Installed Installation order for
Number SMU additional SMUs
1 MPSMU Default
2 HRSMU Default
3 HPSMU Optional HPSMU
4 HPSMU Optional HPSMU
5 MPSMU Default
6 MPSMU 1
7 MPSMU 2
Port Installed Installation order for
Number SMU additional SMUs
1 HRSMU Optional HRSMU
2 HRSMU Default
3 HPSMU Optional HPSMU
4 MPSMU Default
5 MPSMU Default
6 MPSMU 1
7 MPSMU 2
Port Installed Installation order for
Number SMU additional SMUs
1 HRSMU Optional HRSMU
2 HRSMU Default
3 HPSMU Optional HPSMU
4 HPSMU Optional HPSMU
5 MPSMU Default
6 MPSMU Default
Port Installed Installation order for
Number SMU additional SMUs
1 HRSMU Optional HRSMU
2 HRSMU Default
3 MPSMU Default
4 MPSMU Default
5 MPSMU 1
6 MPSMU 2
7 MPSMU 4
8 MPSMU 5
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