
11
Recommended Conditions
for Low Current and Low
Voltage Measurements
In addition to the conditions
listed in General Specifications,
Agilent Technologies recom-
mends that the following addi-
tional conditions be satisfied for
measuring precise low current
and low voltage with the 4073A.
Note: These conditions are not specified to guarantee a
certain measurement performance.
Auto probers
5
:
TEL P8LC, P12XL
TSK UF200, UF300, UF3000
EG 5|300e
Probe cards
5
:
JEM (Japan Electronic
Materials Co.)
MJC (Micronics Japan Co.)
K&S (Kulicke & Soffa
Industries Inc.)
Temperature: Within ±1°C after
calibration
Temperature change period:
≥10 minutes
Humidity: ≤50 %
Warm up time: ≥60 minutes
Floor vibration: ≤1 mG
Floor vibration frequency: ≥10 Hz
Air cleanliness: ≤class 10,000
Line voltage: Burst noise ≤ 1 kV,
Surge noise ≤1 kV
This line voltage environment
applies EN61326–1
5
Please contact your local sales representative regarding
the latest information on recommended probers and
probe cards
General Specifications
Accuracy is specified at:
Temperature: 23° C ± 5° C
Humidity: 5% to 70% RH
1
Warm up: at least 40 min.
Self-calibration: Within one hour
after calibration
Integration Time: Medium or
Long
2
Regulatory and Standard Compliance:
EMC:
EMC Directive 89/336/EEC,
93/68/EEC
EN61326-1
ICES-001
AS/NZS 2064.1
Safety:
Low Voltage Directive 73/23/
EEC, 93/68/EEC
EN61010-1
CSA C22.2 No.1010.1
UL3111-1
SEMI S2-0200/S8-0999
Operating Temperature Range:
5°C to 30°C
Operating Humidity range:
5% to 70% (no condensation)
Storage Temperature Range:
–20°C to 50°C (< 80% RH, no
condensation)
4
Warm up time: At least 40 minutes
1
5% to 60% RH (no condensation) for isolation
resistance of low current port.
2
For SMU current ranges that are less than or
equal to 1 nA, the integration time must be Long
(16 PLC or longer).
Note: Temperature change after calibration must
be less than 3° C.
3
Line frequency must be 48 Hz to 63 Hz.
4
For an unpacked system, –20° C to 60 °C
(< 90% RH, <12 hrs).
Certification marking
CE, CSA, NRTL/C, C-tick, ICES/
NMB-001
Dimensions
System Cabinet:
600 mm (W) by 900 mm (D) by
1600 mm (H)
Testhead:
640 mm (W) by 642 mm (D) by
400 mm (H)
Weight
System Cabinet:
250 kg (including 3458A,
81110A × 4, 8114A and system
controller)
Note: Cabinet weight approximately 4 kg
less using 5 HV-SPGUs instead of 4
81110As and an 8114A.
Testhead:
70 kg (including 4 SMUs and
48 pins)
Power Requirement
Nominal Allowable Required
Line Voltage Maximum
Voltage
3
Range Current
200 Vac 180 - 220 Vac 20 A
208 Vac 188 - 228 Vac 24 A
220 Vac 198 - 242 Vac 20 A
240 Vac 216 - 252 Vac 20 A
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