Agilent Technologies B1500A Podręcznik Użytkownika Strona 162
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4- 22 Keysight B1500A User’s Guide, Edition 14
Specifications
Hardware
MFCMU
MFCMU: Multi Frequency Capacitance Measurement Unit
• Measurement functions
• Measurement parameters: Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D, Cs-Q,
Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs, Ls-D, Ls-Q, R-X, G-B, Z-, Y-
• Ranging: Auto or fixed
• Measurement terminal: Four-terminal pair configuration, four BNC (female)
connectors
• Cable length: 1.5 m or 3 m, automatic identification of accessories
• Test signal
• Frequency
Range: 1 kHz to 5 MHz
Resolution: 1 mHz (minimum)
Accuracy: ± 0.008 %
• Output signal level
Range: 10 mVrms to 250 mVrms
Resolution: 1 mVrms
Accuracy:
± (10.0 % + 1 mVrms) at the measurement port of the MFCMU
± (15.0 % + 1 mVrms) at the measurement port of the MFCMU cable (1.5 m
or 3.0 m)
• Output impedance: 50 , typical
• Signal level monitor
Range: 10 mVrms to 250 mVrms
Accuracy (open load):
± (10.0 % of reading + 1 mVrms) at the measurement port of the MFCMU
± (15.0 % of reading + 1 mVrms) at the measurement port of the MFCMU
cable (1.5 m or 3.0 m)
- Keysight Technologies B1500A 1
- Semiconductor Device Analyzer 1
- Safety Summary 6
- Safety Symbols 8
- Circuit Common 11
- Product Stewardship 16
- Precautionary Statement 17
- Working in Comfort 18
- In This Manual 20
- Contents 21
- 1 Getting Started 25
- + agb1500a 27
- + UsbDevice1 27
- To Turn B1500A On 28
- To Turn B1500A Off 28
- To Launch EasyEXPERT 30
- If Only One Workspace Exists 31
- To Create Workspace 32
- To Select Workspace 33
- To Use Tracer Test Mode 34
- To Use Application Test Mode 36
- Test Definitions 37
- To Use Classic Test Mode 38
- To Perform Measurement 40
- To Use Test Result Editor 41
- To Use Analysis Tools 42
- 2Introduction 43
- Application Library 44
- Overview 45
- Keysight EasyEXPERT Software 48
- Front View 50
- Rear View 53
- Measurement Modules 59
- About SMU 60
- HPSMU - High Power SMU 61
- MPSMU - Medium Power SMU 64
- To connect ASU 67
- Before using 1 pA range 67
- MCSMU - Medium Current SMU 68
- HRSMU - High Resolution SMU 70
- MFCMU - Multi Frequency CMU 74
- 300 k7 range 76
- 50 7 range 76
- HVSPGU - High Voltage SPGU 77
- 3 Installation 79
- Requirements 82
- Installation Requirements 83
- Power Cable 83
- Inspection and Installation 85
- To Perform Initial Setup 86
- To Change GPIB Address 88
- To Enable System Controller 89
- Installing Accessories 90
- To Set up 16442B (B1500A-A5F) 91
- To Connect Connector Plate 93
- To Connect ASU 95
- About ASU output cables 97
- To Connect SCUU/GSWU 99
- About SCUU output cables 101
- Connector handle 103
- Banana jack 103
- Selection switch SW2 and SW4 105
- Input Panel 106
- Output Panel 106
- Mounting Connectors 107
- 2 − 11.3 3.2 2 − M3 x 0.5 108
- 14 11 11 14 108
- Connector side 109
- Interlock switch 109
- Wiring side 109
- Installation 111
- To Connect GNDU Output 112
- To Connect SMU Output 113
- To Minimize Leakage Current 114
- To Connect MCSMU Output 119
- To Connect MFCMU Output 120
- Stop key 121
- Using Test Fixture 122
- SMU(±200V= 1A Max) 123
- Substrate 123
- To Reduce Leakage Current 124
- To Measure Low Resistance 126
- Switching Matrix 128
- Required Conditions 129
- FORCE or SENSE (A) 134
- FORCE or SENSE (B) 134
- Insulator 134
- Triaxial Cable 134
- Maintenance 136
- About Plug-in Modules 137
- To Interconnect SPGUs 138
- To Interconnect WGFMUs 139
- About Module Installation 140
- 4 Specifications 141
- Specification Conditions 143
- Supported Plug-in Modules 144
- Maximum Module Configuration 146
- Ground Unit (GNDU) 147
- MPSMU/HRSMU 148
- Specifications 149
- Hardware 149
- Connect ASU to dedicated SMU 151
- Connection path control 151
- SMU Common Specifications 157
- ± 1 mV (HPSMU) 161
- SCUU/GSWU 167
- V at 300 sec 168
- Point Time Voltage 173
- Selector 174
- Selector Adapter 174
- WGFMU/RSU 175
- Operation mode 182
- Application library 182
- Oscilloscope view 183
- Measurement modes 184
- Sweep measurement 184
- Data display 186
- Automatic analysis function 187
- Arithmetic functions 187
- Workspace and data management 188
- External instrument control 188
- Furnished Software 189
- Desktop EasyEXPERT Software 190
- General Specifications 191
- 5 Accessories and Options 193
- *B1500-90000* 204
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