Agilent Technologies 16440A Instrukcja Obsługi Pobierz pdf (Strona 66)

3- 6 Agilent B1500A Configuration and Connection Guide, Edition 5

Connection Guide for Wafer Prober

SMU/GNDU connection with prober

Table 3-4 Item number information for GNDU non-Kelvin connection with B1500A

Kelvin connection

These instructions apply when all connections are Kelvin. Two probes must contact the

wafer in this connection. Connect an Agilent 16493K Kelvin triaxial cable (or two Agilent

16494A triaxial cables) between the SMU and the connector plate. Connect the FORCE

and SENSE lines to probes separately. Connect the triaxial connector on the probe cable as

shown in

Figure 3-6. For parts information, see Table 3-5.

NOTE To prevent oscillations, do not use cables longer than 1.5 m, if you use two 16494A triaxial

cables with Kelvin connections.

Figure 3-6 Example of an SMU Kelvin connection

Table 3-5 Item number information for SMU Kelvin connection with B1500A

Description Qty Product Number Part number

Triaxial cable (1.5 m) 1 16494A-001 N/A

Triaxial cable (3.0 m) 1 16494A-002 N/A

Description Qty Product Number Part number

Kelvin triaxial cable (1.5 m) - max 3.0 A 1 16493K-001 N/A

Kelvin triaxial cable (3.0 m) - max 2.6 A 1 16493K-002 N/A

1 2 ... 61 62 63 64 65 66 67 68 69 70 71 ... 115 116

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Agilent Technologies 16440A Instrukcja Obsługi Strona 66