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1-6 Agilent E5250A User’s Guide, Edition 11
Introduction
Agilent E5252A Product Description
Agilent E5252A Product Description
The E5252A 10×12 Matrix Switch is a 10-input to 12-output switching matrix card
for the E5250A. The E5252A is designed for semiconductor dc parametric
measurement applications that need to switch some instruments connected to
Device Under Test (DUT), or need to scan instrument input/output for many DUTs,
automatically.
The E5250A can be installed with maximum four E5252As. And the input terminals
of the E5252As are connected together inside the E5250A. So, the E5250A can
configure a 10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and
10×48 matrix (four E5252As). The E5252A block diagram and output connectors
are shown in Figure 1-3 and Figure 1-4.
Figure 1-3 E5252A Block Diagram
- Agilent E5250A 1
- Manual Part Number 2
- Warranty 2
- Technology Licenses 2
- Restricted Rights Legend 2
- Safety Summary 5
- Safety Symbols 7
- In This Manual 8
- Contents 11
- 1 Introduction 17
- Front Panel Tour 20
- Rear Panel Tour 20
- Options and Accessories 28
- 2 Installation 33
- Requirements 36
- Installation 37
- Operating Environment 38
- Installing the E5250A 39
- To Install Plug-in Card 40
- To Install Blank Panel 41
- To Configure E5255A 42
- To Modify BIAS Input 43
- To Mount Protective Resistors 44
- E5255A Configuration Examples 45
- To Bias Source 47
- BNC T-adapter 47
- BNC cable 47
- Agilent E5255A 47
- To Set GPIB Address 49
- To Connect GPIB Cable 49
- Maintenance 50
- Executing Self-Test 53
- Executing the Controller Test 54
- Executing the Relay Test 54
- Relay Test Adapter 55
- SCPI Commands for Self-Test 56
- Local/Self Test key on the 57
- Self-Test Programming Example 58
- Using the Self-Test Utility 60
- To Execute Self-Test 62
- To Execute Leak Test 65
- Connector Plates 73
- Blank Plate 74
- Mounting Connectors Directly 76
- 2 − ∅11.3 ∅3.2 2 − M3 x 0.5 77
- 14 11 11 14 77
- To Make Interlock Circuit 78
- To Install LED Circuit 80
- To Connect Connectors to DUT 83
- Connecting the E5250A Input 85
- Kelvin Triaxial Cable 87
- BNC Cable 87
- INTLK Cable 87
- Connecting the E5250A Output 90
- Connector Plate Side 91
- E5252A Side 91
- To Connect the E5255A Output 92
- Measurement Cable Length 93
- 5 Controlling the E5250A 95
- Creating Your Own Program 97
- Modifying a Sample Program 98
- Channel Configuration 102
- Connection Rule 103
- Connection Sequence 104
- Bias Mode 105
- Couple Port 107
- E5252A Channel List 109
- Switch Control Basics 110
- Controlling the E5250A 110
- Auto Configuration Mode 111
- E5255A Channel List 113
- GET "_" 121
- E5252A 10x12 Matrix Switch 122
- Changing the VFP Setup Mode 123
- To change the Bias Mode state 124
- Enter key 125
- To copy a setup memory 128
- Clear all setup memory. OK? 129
- Enter key. If you 133
- Enter key. Current Setup 133
- Input Save file name 136
- Input Load file name 136
- 6 Programming the E5250A 137
- SCPI Programming Basics 139
- :ROUT:CONN:RULE ALL,FREE 140
- :ROUT:CONN:SEQ ALL,BBM 140
- 10 ASSIGN @Hp5250 TO 722 141
- Creating a Control Program 142
- Defining Connection Rule 144
- Defining Connection Sequence 145
- Using Bias Mode 146
- Controlling Relay Switching 148
- Programming Examples 149
- Channel Creation Example 150
- Bias Mode Example 152
- Couple Port Example 155
- VFP Data Upload Library 159
- Connect_vfp subprogram 160
- FNGet_vfp_comment$ subprogram 160
- Programming Example 161
- GET "UPLOAD" 162
- RE-STORE "U_LIB" 162
- MSI ":CS80,701,1" 162
- Error Messages 163
- Required Conditions 166
- FORCE or SENSE (A) 167
- FORCE or SENSE (B) 167
- Insulator 167
- Triaxial Cable 167
- 7 Command Reference 169
- Common Commands 172
- :DIAGnostic Subsystem 183
- :DIAGnostic:TEST:CARD:CLEar 184
- :DIAGnostic:TEST:CARD:STATe? 185
- :DIAGnostic:TEST:FRAMe:CLEar 185
- :ROUTe Subsystem 188
- ENTER @Hp5250;A$ 191
- [:ROUTe]:BIAS:PORT 195
- [:ROUTe]:BIAS:PORT? 196
- [:ROUTe]:BIAS[:STATe] 197
- [:ROUTe]:BIAS[:STATe]? 198
- [:ROUTe]:CLOSe:CARD? 198
- [:ROUTe]:CLOSe[:LIST] 199
- [:ROUTe]:CLOSe[:LIST]? 199
- [:ROUTe]:CONNection:RULE 200
- [:ROUTe]:CONNection:RULE? 200
- [:ROUTe]:CONNection:SEQuence 201
- [:ROUTe]:COUPle:PORT 203
- [:ROUTe]:COUPle:PORT? 204
- [:ROUTe]:COUPle[:STATe] 205
- [:ROUTe]:COUPle[:STATe]? 206
- [:ROUTe]:FUNCtion 207
- [:ROUTe]:FUNCtion? 207
- [:ROUTe]:OPEN:CARD 208
- [:ROUTe]:OPEN[:LIST] 208
- [:ROUTe]:OPEN[:LIST]? 209
- :SYSTem Subsystem 210
- :SYSTem:CCONfig? 211
- :SYSTem:CDEScription? 212
- :SYSTem:CPON 213
- :SYSTem:CTYPe? 214
- :SYSTem:ERRor? 215
- :SYSTem:VERSion? 215
- Status Reporting Structure 216
- Status Byte Register 218
- Output Queue 223
- Command Reference 224
- 8 VXIplug&play Driver 225
- System Requirements 227
- Driver Functions 229
- VXIplug&play Driver 256
- 9 Executing Sample Programs 257
- Introduction 259
- Vth Measurement Setup 261
- Capacitance Measurement Setup 262
- MSI ":CS80,702,1" 265
- GET "SP_MAT" 265
- RE-STORE "P_MAT" 265
- GET "C_COMPEN" 265
- RE-STORE "C_COM" 265
- Modifying the Program 267
- HCI Measurement Program 273
- SMU1 VG IG V VAR1 275
- SMU3 VD ID V CONST 275
- SMU4 VB IB V CONST 275
- GNDU VS IS COMMON CONST 275
- Required Equipments 278
- BIAS SOURCE 1 282
- HP BASIC 282
- CONTROLLER 282
- BIAS SOURCE 3 282
- BIAS SOURCE 2 282
- LOAD "SP_MUX" 283
- Executing Sample Programs 284
- To Execute HCI Test Program 285
- GET "SP_MUX_A" 288
- MSI "/test_data" 288
- ID=1 μA × W/L 292
- To change the stress times 293
- To change the test limits 294
- 10 Specifications 295
- General Specifications 297
- Option 001 Matrix Switch 298
- Typical Data 299
- Supplemental Data 299
- Option 501 Multiplexer 300
- Accessories 302
- 4155/4156 303
- Specifications 304
- 11 Error Messages 305
- Standard SCPI Error Messages 307
- Execution Error 311
- Device-Dependent Errors 312
- Query Errors 313
- 12 SCPI Command Summary 319
- SCPI Command Summary 321
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