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Module 8
Capacitance Measurement
8-5
Single Sweep
Double Sweep
Linear Sweep
Up to +/- 25 V, using only CMU
Up to +/- 100 V, using SCUU (Agilent N1301A-100)
C-V Sweep Source
CMU supports the linear single sweep and the linear double sweep. The CMU can sweep up to a
value and then back down (double sweep). This feature is useful when the device must be tested
without abruptly removing the forcing condition.
The CMU can force up to 25 V DC bias. The DC bias can be expanded up to 100 V by using the
SCUU (SMU CMU unify unit) that is used to switch the IV measurement and the CV measurement
automatically. For the SCUU, see the following pages in this module.
- Agilent B1500A 1
- Semiconductor Device 1
- Analyzer 1
- Manual Part Number 2
- Warranty 2
- Technology Licenses 2
- Restricted Rights Legend 2
- In This Manual 4
- Class Exercises 6
- Demo.xpg file 7
- .xtd files 7
- .xtr files 7
- 1 ohm Resistor 10
- 1.1 kohm Resistor 10
- 511 kohm Resistor 10
- 0.1 uF Capacitor 10
- Module 1. Introduction 13
- Module 2. Getting Started 13
- Module 5. Basic Measurement 15
- Contents 20
- Contents-8 20
- 7 Measurement Functions 21
- In This Module 22
- SMU Pulsed Sweep Measurement 23
- SMU Pulse Mode 24
- VAR1 Sweep 24
- Pulse On Primary Source 25
- Hints on Pulsing the HPSMU 26
- Limitations 27
- SMU Triax Connection 29
- Jumper Leads – MOS transistor 30
- Data Display Window 31
- Drain pulse 32
- Enter new name before save 32
- Channel Setup 32
- Measurement Setup 33
- I/V-t Sampling Measurement 34
- Sampling Measurement 36
- Module 7 37
- Measurement Functions 37
- RC Measurement 38
- 10 data/decade 39
- Variable for time data 40
- Sampling Exercise 40
- High speed ADC 41
- FIXED range 41
- Bias starts at 0 s 42
- Negative Hold Time 42
- Interval < 2 ms 44
- Current source 44
- Channel and Measurement Setup 44
- Auto Analysis 45
- Vth Example 46
- Vth Measurement 47
- Damaged MOS FET Device? 49
- Function Setup 51
- Display Setup Page 52
- Analysis Setup Page 53
- SMU Filter 54
- SMU Filter: ON (add filter) 55
- SMU Series Resistor 56
- 0.5 M ohm (device only) 59
- Series R: 1MOHM (add 1 M ohm) 60
- Calculated value 62
- Compensation 62
- Standby Function 63
- To Use Standby Function 64
- Bias Hold After Measurement 65
- Bias Hold Function 66
- Bias Hold Exercise 68
- Repeat Measurement Setup 69
- LED lights on 70
- LED lights off 70
- 8 Capacitance Measurement 71
- B1500A Multi Frequency CMU 73
- CMU Block Diagram 74
- C-V Sweep Source 75
- C-V Sweep Measurement 76
- Cable Connections 77
- Conductance 79
- Capacitance Measurement 79
- Measurement Example 79
- CMU Calibration 81
- Calibration 82
- Opens dialog box to start 82
- SCUU – for IV/CV Switching 83
- Module 8 84
- GSWU Connection Example 87
- ASU – for IV/CV Switching 88
- Configuration 90
- ASU Switch Control 90
- Modification Overview 93
- To Modify Test Definition 100
- Test Definition editor 100
- Variable Yes is used in 101
- Class Exercise 104
- To Use Debug Tools 105
- Break point 105
- ReturnPort = SMU1 105
- ReturnCh = OUT1 105
- Variable Inspector 105
- Debug: Inspect button 107
- Paused point 107
- Module 9 109
- To Use Built-in Functions 110
- To Use Read Out Functions 112
- Vth = @L1X 113
- To Add Data Display 114
- To Use Auto Analysis Function 116
- Data Display: OFF/ON 117
- Data Store: OFF/ON 117
- Assign to external variables… 118
- Setup example 119
- Result example 120
- Using built-in functions 121
- To use Auto Analysis twice 124
- Auto Analysis Setup 128
- Check this box 128
- To Set Display Setup 129
- Display Setup 129
- Idrain=Id@Vth*Polarity 130
- To Use Auto Analysis Twice 131
- Setting vector data 135
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